Radimo Radical Monitor <Opposing Type Radical Monitor DP Type>
This is the world's first ultra-compact radical absolute density measurement device that can be used in processes.
The Radimo Radical Monitor <Opposing Type Radical Monitor DP Type> is a monitoring device that measures atomic radicals in the gas phase generated during etching, surface treatment, and thin film production, enabling feedback into the process. It is the world's first ultra-compact radical absolute density measurement device that can be used in processes. It measures atoms present in the ground state in plasma using absorption spectroscopy, allowing for the selection of the optimal structure based on the measurement target and purpose. The measurement software is equipped with the latest calibration results from research conducted at Nagoya University’s Hori Laboratory. For more details, please contact us or refer to the catalog.
- Company：片桐エンジニアリング
- Price：Other
